- Rectangular: edge length 0.5 mm – 600 mm
- Round: diameter 0.5 mm – 600 mm
- 0.1 mm – 50 mm (depending on size)
- Planarity: up to λ/10 (select ≤ 6 for diameter-to-thickness or diameter-to-greatest-edge length ratio depending on size), diameter or edge length can be measured up to 250 mm diameter. Documented proof available for up to 150 mm on request
- Parallelism: up to 1″ depending on dimensional details or
- Wavefront deformation up to λ/10 depending on dimensional details
- Thickness: up to ±0.005 mm
Higher precision on request.